Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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==Stitching== | ==Stitching== | ||
{|border="1" cellspacing="0" cellpadding=" | {|border="1" cellspacing="0" cellpadding="2" style="text-align:left;" | ||
|- | |- | ||
| Line 34: | Line 34: | ||
!Median [µm] | !Median [µm] | ||
!Error [µm] | !Error [µm] | ||
!Run-out | !Run-out [ppm] | ||
!Rotation [ppm] | !Rotation [ppm] | ||
|- | |- | ||
| Line 53: | Line 53: | ||
|0.42±2.33 | |0.42±2.33 | ||
|0.00±1.18 | |0.00±1.18 | ||
|} | |||
Test results: | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
! | |||
!Median [µm] | |||
!Error [µm] | |||
!Run-out [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|X | |||
|'-0.03±0.05 | |||
|0.01±0.05 | |||
|1.00±2.33 | |||
|0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|110 nm oxide | |||
| | |||
| | |||
|taran | |||
|average of nine measurements (three measurements on three different samples) | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Borofloat (glass) | |||
| | |||
| | |||
|taran | |||
|average of three measurements on one sample | |||
|} | |} | ||
==Overlay== | ==Overlay== | ||