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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Etch_3_dimensional_silicon_microstructures click here]''
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Etch_3_dimensional_silicon_microstructures click here]'''


* ''This work was done by Henri Jansen and Bingdong Chang in 2017;''
* ''This work was done by Henri Jansen and Bingdong Chang in 2017;''
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