Specific Process Knowledge/Lithography/Coaters: Difference between revisions

@@ Line 120: / Line 120: @@
 |style="background:LightGrey; color:black"|Manual dispense option
 |style="background:WhiteSmoke; color:black"|
+* no manual dispense
 * syringe dispense (60cc) of PGMEA-based resist
 |style="background:WhiteSmoke; color:black"|
-* no
+* no manual dispense
 |style="background:WhiteSmoke; color:black"|
+* no manual dispense
 * syringe dispense (30cc) of PGMEA and anisole-based resist
 |style="background:WhiteSmoke; color:black"|
+* yes
 * pneumatic dispense for SU-8 resist and EBR solvent
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@@ Line 173: / Line 176: @@
 *150 mm wafers (tool change required)
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-*50 mm wafers
+*2" or 50 mm wafers
 *100 mm wafers
 *150 mm wafers