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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,567 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,567 edits
Line 126: Line 126:
* syringe dispense (30cc) of PGMEA and anisole-based resist
* syringe dispense (30cc) of PGMEA and anisole-based resist
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|style="background:WhiteSmoke; color:black"|
* yes
* pneumatic dispense for SU-8 resist and EBR solvent
* pneumatic dispense for SU-8 resist and EBR solvent
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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