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Specific Process Knowledge/Characterization/Probe station: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Rkch (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
285 edits
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Purpose  
Purpose  
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Thickness measurer
Electrical measurements
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*Wafer thickness
*I/V
*Depths of larger grooves
*Resistance
*Heigth of larger mesas
*Heigth of larger mesas
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Performance
Performance
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Thickness resolution
Pad size
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*< 5 µm
*100x100µm or more
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