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Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, danchip
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Choi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, danchip
641 edits
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[[Image:7-up_RR3.jpg|300x300px|right|thumb|Fume hood 01 and 02 in cleanroom D3]]
[[Image:7-up_RR3.jpg|300x300px|right|thumb|Fume hood 01 and 02 in cleanroom D3]]
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The user manual, user APV and contact information can be found in LabManager:
User manuals, risk assessments and contact information can be found on the equipment Info-pages in LabManager:<br>
<!-- remember to remove the type of documents that are not present -->
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=383 Wafer Cleaning Info page in LabManager]<br>[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=382 Mask Cleaning Info page in LabManager]
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=135 7-up 6" info page in LabManager] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=69 7-up (masks) info page in LabManager]
<br>[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=368 Fume hood 01 Info page in LabManager]
 
<br>[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=369 Fume hood 02 Info page in LabManager]
'''The APV for working with piranha in fumehood can be found by clicking''' [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=197 here]


===Comparing the 7-up cleans and Piranha clean===
===Comparing the 7-up cleans and Piranha clean===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha"