Specific Process Knowledge/Lithography/Coaters: Difference between revisions

@@ Line 69: / Line 69: @@
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 * Cassette-to-cassette
+* Vacuum handling and detection
+* Vacuum spin chuck
 |style="background:WhiteSmoke; color:black"|
 * Cassette-to-cassette
+* Vacuum handling
+* Vacuum spin chuck
 |style="background:WhiteSmoke; color:black"|
 * Cassette-to-cassette
+* Vacuum handling and detection
+* Vacuum spin chuck
 |style="background:WhiteSmoke; color:black"|
 * Single substrate
-* Non-vacuum chuck for fragile substrates
+* Vacuum chuck for 4" and 6"
+* 4" non-vacuum chuck for fragile substrates
 |colspan="2" style="background:WhiteSmoke; color:black"|
 * Single substrate
-* Edge handling chuck
+* Vacuum chucks for chips, 2", 4", and 6"
+* 4" edge handling chuck
 |style="background:WhiteSmoke; color:black"|
-*Single substrate
+* Single substrate
+* Vacuum chuck
 |style="background:WhiteSmoke; color:black"|
 * Can handle almost any sample size and shape
@@ Line 134: / Line 143: @@
 *10 - 5000 rpm (3000 rpm with non-vacuum chuck)
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-*100 - 5000 rpm
+*100 - 5000 rpm (3000 rpm with edge handling chuck)
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 *100 - 7000 rpm