Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*Spin coating of anisole based E-beam resists | *Spin coating of anisole based E-beam resists | ||
*Spin coating of PGMEA based UV resists | *Spin coating of PGMEA based UV resists | ||
*Soft baking | *Soft baking | ||
*Edge bead removal (e-beam resists and novolac-based UV resists) | |||
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!style="background:silver; color:black;" align="center" width="60"|Resist | !style="background:silver; color:black;" align="center" width="60"|Resist | ||