LabAdviser/Courses: Difference between revisions

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+== <!-- Mask Design --> ==
+<!--
+DTU Danchip offers a Tool Package Training in Mask Design; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
+The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
+{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
+|-
+|-
+|-style="background:White; color:black; text-align:center"
+!colspan="2"|Dry Etch Tool Package Training
+|-
+|-
+!Schedule
+|
+'''Theoretical part'''
+* A 3-hour lecture. The next 3 hour lecture is on the '''21st of September''' from 9:00 to approximately 12. Sign up via: [https://doodle.com/poll/8nhebimzqy2cy2p8 Dry Etch TPT Lecture doodle]
+'''Practical part'''
+* A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
+|-
+|-
+!Location
+|
+'''Theoretical part'''
+* The location of the lecture will be notified after you have signed up
+'''Practical part'''
+* The training session takes place inside the cleanroom. The meeting point will be in The gowning area
+|-
+|-
+!Qualified Prerequisites
+|
+* Cleanroom safety course at DTU Danchip
+* Admission to the cleanroom must be obtained before the training session
+|-
+|-
+!Preparations
+|
+'''Before the lecture'''
+*Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment]
+'''Before training session'''
+* Watch the training video: TPT hands-on intro
+* Watch the screen cast video's for the ASE/AOE software:See below
+* Watch the screen cast video's for the DRIE/ICP meat and III-V ICP:  See below
+|-
+|-
+!Course Responsible
+|
+The Dry Etch Group at DTU Danchip.
+If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].
+|-
+|-
+!Learning Objectives
+|
+*Know why and when to use dry etching
+*Use the dry etchers without harming the machines
+*Select the right instrument to use for his/her dry etch processing
+*Select an appropriate etch recipe for his/her dry etch processing
+*Spot when the recipe needs to be tuned for his/her needs and
+*Suggest relevant tuning parameters
+|-
+|}
+<br clear="all" />
+===Material for preparations and further information===
+{| style="color: black;" width="90%"
+| colspan="3" |
+|-
+| style="width: 20%" valign="top"|
+'''<big>Literature</big>'''
+* No extra Literature at the moment
+'''<big>Pre Lecture video</big>'''
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment 5min37s]
+'''<big>Slides from Lecture</big>'''
+-->
+<!-- *Lecture slide show [[Media:TPT Dry etching 20170223.pptx]]
+*Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] -->
+<!--
+*Lecture slide show [[Media:TPT Dry etching Aug2017.pptx]]
+*Lecture slides with explanatory text included [[Media:TPT Dry etching Aug2017.pdf]]
+| style="width: 20%"|
+'''<big>Pre hands-on training videos</big>'''<br>
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
+Screen cast videos for the DRIE, ICP metal and III-V ICP:
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]
+Screen cast videos for the ASE and AOE:
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
+*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
+| style="width: 20%"|
+|}
+<br clear="all" />
+-->
 ==The Dry Etch TPT  ==