Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
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==LPCVD (Low Pressure Chemical Vapor Deposition) PolySilicon== | ==LPCVD (Low Pressure Chemical Vapor Deposition) PolySilicon== | ||
[[Image:A4_Furnace_PolySi.jpg|300x300px|thumb|A4 Furnace PolySilicon: positioned in cleanroom 2]] | [[Image:A4_Furnace_PolySi.jpg|300x300px|thumb|A4 Furnace PolySilicon: positioned in cleanroom 2]] | ||