Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride: Difference between revisions
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SRN: Silicon Rich Nitride | SRN: Silicon Rich Nitride | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan=""|Performance | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness| | |style="background:LightGrey; color:black"|Film thickness| | ||
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*Few defects | *Few defects | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan=" | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||