Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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*Thermal evaporation | *Thermal evaporation | ||
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!style="background:silver; color:black" align="left" rowspan="2"|Performance | !style="background:silver; color:black" align="left" rowspan="2" valign="top" |Performance | ||
|style="background:LightGrey; color:black"|Film thickness | |style="background:LightGrey; color:black"|Film thickness | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*~2.5Å/s - 15Å/s | *~2.5Å/s - 15Å/s | ||
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!style="background:silver; color:black" align="left" rowspan= "2"|Process parameter range | !style="background:silver; color:black" align="left" rowspan= "2" valign="top" |Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*~3x10<sup>-7</sup> - 4x10<sup>-6</sup> mbar | *~3x10<sup>-7</sup> - 4x10<sup>-6</sup> mbar | ||
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!style="background:silver; color:black" align="left" rowspan="3"|Substrates | !style="background:silver; color:black" align="left" rowspan="3" valign="top" |Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||