Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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*Thermal evaporation | *Thermal evaporation | ||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left" rowspan="2"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness | |style="background:LightGrey; color:black"|Film thickness | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~10Å - 1µm | *~10Å - 1µm | ||
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|style="background:LightGrey; color:black"|Deposition rate | |style="background:LightGrey; color:black"|Deposition rate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~2.5Å/s - 15Å/s | *~2.5Å/s - 15Å/s | ||
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!style="background:silver; color:black" align="left"|Process parameter range | !style="background:silver; color:black" align="left" rowspan= "2"|Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Less than 80 <sup>o</sup>C | *Less than 80 <sup>o</sup>C | ||
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|style="background:LightGrey; color:black"|Process pressure | |style="background:LightGrey; color:black"|Process pressure | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~3x10<sup>-7</sup> - 4x10<sup>-6</sup> mbar | *~3x10<sup>-7</sup> - 4x10<sup>-6</sup> mbar | ||
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!style="background:silver; color:black" align="left"|Substrates | !style="background:silver; color:black" align="left" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*Deposition on one side of the substrate | *Deposition on one side of the substrate | ||
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| style="background:LightGrey; color:black"|Substrate material allowed | | style="background:LightGrey; color:black"|Substrate material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*Pyrex wafers | *Pyrex wafers | ||
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| style="background:LightGrey; color:black"|Material allowed on the substrate | | style="background:LightGrey; color:black"|Material allowed on the substrate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||