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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride: Difference between revisions

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!Batch size
!Batch size
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*1-25 100 mm wafers
*1-15 100 mm wafers (4" furnace), 1-25 100 mm wafers (6" furnace)
*1-25 150 mm wafers (only 6" furnace)  
*1-25 150 mm wafers (only 6" furnace)  
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