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Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

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[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom B-1]]
[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom B-1]]


The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. <br/>
The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it has can do spectroscopic ellipsometry at varialble angles <br/>
The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements.
The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements.


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