Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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== Thin Au layer deposition == | == Thin Au layer deposition == | ||
For depositing very thin, down to 6nm continuous Au layers on Si/SiO_2 substrates | |||
Adhesion promoter: aminopropyltrimethoxysilane (APTMS) | |||
Adhesion promoter deposition: 3h immersion in 95%IPA, 2.5% H_2O, 2.5% APTMS | |||