Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
| Line 139: | Line 139: | ||
*polymers | *polymers | ||
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|style="background:silver; color:black"| . | |style="background:silver; color:black"||.|style="background:LightGrey; color:black"|Film thickness range | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~1µm to 15 µm | *~1µm to 15 µm | ||
|- | |- | ||
|style="background:silver; color:black"| . | |style="background:silver; color:black"||. |style="background:LightGrey; color:black"|Film thickness accuracy | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*±(0.5%+50Å) | *±(0.5%+50Å) | ||