Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*polymers | *polymers | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"|||style="background:LightGrey; color:black"|Film thickness range | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~1µm to 15 µm | *~1µm to 15 µm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"|||style="background:LightGrey; color:black"|Film thickness accuracy | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*±(0.5%+50Å) | *±(0.5%+50Å) | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"|||style="background:LightGrey; color:black"|Index accuracy | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*±0.001 | *±0.001 | ||
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*One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6" | *One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6" | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"||| style="background:LightGrey; color:black"|Substrate material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*In principle all materials | *In principle all materials | ||