Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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===Comparison of the two profilers and the AFM=== | ===Comparison of the two profilers and the AFM=== | ||
{| border="2" cellspacing="0" cellpadding="4" align="center" | {| border="2" cellspacing="0" cellpadding="4" align="center" | ||
! | ! | ||
!Tencor | !Tencor | ||
!Dektak | !Dektak | ||