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Specific Process Knowledge/Characterization/XPS/XPS technique: Difference between revisions

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=XPS technique=
=XPS technique=


XPS is a surface sensitive and non destructive technique used for analysis of the elemental composition of a sample. It relies on the photoelectric effect; X-ray photons irradiated onto a sample will cause electrons bound in the sample atoms to become free electrons inside the the sample. The kinetic energy of these photoelectrons depend on the energy of the X-ray photon and their original binding energy.  
XPS is a surface sensitive and non destructive technique used for analysis of the elemental composition of a sample. It relies on the photoelectric effect; X-ray photons irradiated onto a sample will cause electrons bound in the sample atoms to become free electrons inside the the sample. The kinetic energy of these photoelectrons depend on the energy of the X-ray photon and their original binding energy. Escaping into the vacuum and counted in the electron spectrometer as function of their kinetic energy, the photoelectrons make a spectrum if represented in terms of numbers as function of their binding energy.


The basic principle is shown below (the image is taken from Wikipedia).
The basic principle is shown below (the image is taken from Wikipedia).