LabAdviser/Courses: Difference between revisions
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'''Practical part''' | '''Practical part''' |
Revision as of 12:05, 24 April 2017
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Courses
We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
The Cleanroom Introduction Course
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]
The Lithography TPT
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Lithography Tool Package Training | |
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Schedule |
Theoretical part
Practical part
|
Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the "questions and exercises" session
Before training session
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below. |
Course Responsible |
The Lithography Group at DTU Danchip. Sign up for the course by e-mailing to lithography@danchip.dtu.dk. |
Learning Objectives |
|
Material for preparations and further information
Literature
|
Training videos
|
The Dry Etch TPT
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
Dry Etch Tool Package Training | |
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Schedule |
Theoretical part
Practical part
|
Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the lecture
Before training session
|
Course Responsible |
The Dry Etch Group at DTU Danchip. Sign up for the course by e-mailing to dryetch@danchip.dtu.dk. |
Learning Objectives |
|
Material for preparations and further information
Literature
|
Pre hands-on training videos Screen cast videos for the DRIE, ICP metal and III-V ICP:
Screen cast videos for the ASE and AOE:
|
The SEM TPT
DTU Danchip offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
SEM Tool Package Training | |
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Schedule |
Theoretical part
Practical part
|
Location |
Theoretical part
Practical part
|
Qualified Prerequisites |
|
Preparations |
Before the lecture
Before the first group training session
Before the one-on-one hands-on
|
Course Responsible |
The SEM Group at DTU Danchip (SEM@danchip.dtu.dk). Sign up for the course by e-mailing to sem@danchip.dtu.dk. |
Learning Objectives |
|
Material for preparations and further information
Slides from Lecture
- Lecture slide show Media:Danchip_SEM_lecture.pptx