Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
Appearance
| Line 53: | Line 53: | ||
!Additional equipment | !Additional equipment | ||
|Kleindiek micromanipulator with Capres 4 point probe | |Kleindiek micromanipulator with Capres 4 point probe | ||
| | | | ||
| | | | ||
|- | |- | ||
!Best obtainable lateral resolution (strongly dependent on user skills and sample type) | !Best obtainable lateral resolution (strongly dependent on user skills and sample type) | ||