Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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**Before the lecture please read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here] | **Before the lecture please read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here] | ||
**Training videos can be found on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos | **Training videos can be found on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos | ||
**The slides from the lecture can be found [[file:Danchip_SEM_lecture.pptx | **The slides from the lecture can be found here [[file:Danchip_SEM_lecture.pptx]] | ||
* For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-SEM-tool-package-training-TPT- SEM TPT] | * For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-SEM-tool-package-training-TPT- SEM TPT] | ||