Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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=== Purpose === | === Purpose === | ||
The STAMP recipe uses the same total amount of FDTS as FLAT but delivers it much slower in order to obtain a much better and conformal coating of fine nanostructures. STAMP should always be used for stamps for nanoimprint lithography irregardless of the | The STAMP recipe uses the same total amount of FDTS as FLAT but delivers it much slower in order to obtain a much better and conformal coating of fine nanostructures. STAMP should always be used for stamps for nanoimprint lithography irregardless of the feature size. | ||
=== Process description === | === Process description === | ||