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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*10 - 5000 rpm (3000 rpm with non-vacuum chuck)
*10 - 5000 rpm (3000 rpm with non-vacuum chuck)
|style="background:WhiteSmoke; color:black"|
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
*100 - 5000 rpm
|style="background:WhiteSmoke; color:black"|
*100 - 5000 rpm
*100 - 5000 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*optional (max. speed 3000 rpm)
*optional (max. speed 3000 rpm)
|style="background:WhiteSmoke; color:black"|
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
*no
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*no
*no
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*100 mm wafer
*100 mm wafer
*150 mm wafer  
*150 mm wafer  
|style="background:WhiteSmoke; color:black"|
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
*50 mm wafers
*100 mm wafers
*150 mm wafers
*small pieces down to 10x10 mm2
|style="background:WhiteSmoke; color:black"|
*50 mm wafers
*50 mm wafers
*100 mm wafers
*100 mm wafers
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1
*1
|style="background:WhiteSmoke; color:black"|
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
*1
|style="background:WhiteSmoke; color:black"|
*1
*1
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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*All cleanroom materials except III-V materials
*All cleanroom materials except III-V materials
|style="background:WhiteSmoke; color:black"|
|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
*Silicon
*III-V materials
*III-V materials
*Si, SiO2, SOI
*Glass
|style="background:WhiteSmoke; color:black"|
*All cleanroom materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*All cleanroom materials
*All cleanroom materials
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