Specific Process Knowledge/Lithography/Coaters: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 13: / Line 13: @@
 |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Coater: Gamma E-beam and UV|Spin Coater: Gamma E-beam and UV]]</b>
 |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]</b>
-|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Manual All Resist]]</b>
+|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: LabSpin 02]]</b>
-|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Manual Standard Resists]]</b>
+|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: LabSpin 03]]</b>
 |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Manual All Purpose]]</b>
 |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters/SprayCoater|Spray Coater]]</b>
@@ Line 46: / Line 46: @@
 **AZ MiR
 **AZ nLOF
-|style="background:WhiteSmoke; color:black"|
+|colspan="2" align="center" style="background:WhiteSmoke; color:black"|
-*Coating of all resists
+*Coating of E-beam resists
-|style="background:WhiteSmoke; color:black"|
+** CSAR, ZEP, PMMA/MMA, HSQ (FOx)
-*Coating of
+*Coating of UV resists
-** CSAR
+**AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF
-** ZEP
+*Coating of imprint resists
-** PMMA/MMA
-** HSQ (FOx)
-**AZ 5214E
-**AZ 4562
-**AZ MiR
-**AZ nLOF
 |style="background:WhiteSmoke; color:black"|
 * Coating of