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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
Line 57: Line 57:
**AZ nLOF
**AZ nLOF
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Coating of
* Coating of
** CSAR
** ZEP
** PMMA/MMA
** HSQ (FOx)
**AZ 5214E
**AZ 4562
**AZ MiR
**AZ nLOF
** ESPACER
** ESPACER
** Experimental resists
* Coating on
** Experimental substrates
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Spraying imprint resist
*Spraying imprint resist
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