LabAdviser/Courses: Difference between revisions
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Revision as of 11:53, 23 March 2017
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Courses
We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.
The Cleanroom Introduction Course
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]
The Lithography TPT
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
| Lithography Tool Package Training | |
|---|---|
| Schedule |
Theoretical part
Practical part
|
| Location |
Theoretical part
Practical part
|
| Qualified Prerequisites |
|
| Preparations |
Before the "questions and exercises" session
Before training session
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below. |
| Course Responsible |
The Lithography Group at DTU Danchip. Sign up for the course by e-mailing to lithography@danchip.dtu.dk. |
| Learning Objectives |
|
Material for preparations and further information
|
Literature
|
Training videos
|
|
The Dry Etch TPT 
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
The course is for all users that intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
| Dry Etch Tool Package Training | |
|---|---|
| Schedule |
Theoretical part
Practical part
|
| Location |
Theoretical part
Practical part
|
| Qualified Prerequisites |
|
| Preparations |
Before the lecture Before training session
Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below. |
| Course Responsible |
The Lithography Group at DTU Danchip. Sign up for the course by e-mailing to lithography@danchip.dtu.dk. |
| Learning Objectives |
|
Material for preparations and further information
|
Literature
|
Training videos
|
|