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==The Dry Etch TPT [[image:Under_construction.png|70px]] ==
==The Dry Etch TPT [[image:Under_construction.png|70px]] ==


DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.  
 
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.


The course is for all users that intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.




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|-style="background:White; color:black; text-align:center"
|-style="background:White; color:black; text-align:center"
!colspan="2"|Lithography Tool Package Training
!colspan="2"|Dry Etch Tool Package Training
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!Schedule
!Schedule
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<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
'''Theoretical part'''
'''Theoretical part'''
* The lecture has been replaced by videos that can be viewed at one's leisure.
* The next 3 hour lecture is on the 28th of Marts from 9:00 to approximately 12.
* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).  
 
* NEXT "questions and exercises" sessions: '''31st of March, 21st of April, 28th of April, 19th of May'''
'''Practical part'''
'''Practical part'''
* A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
* A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
* NEXT training sessions: '''5th of April, 26th of April, 3rd of May, 24th of May'''
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'''Theoretical part'''
'''Theoretical part'''
* The location of the "questions and exercises" session will be specified after signing up for the course.
* The location of the lecture will be notified after you have signed up  
'''Practical part'''
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
* The training session takes place inside the cleanroom. The meeting point will be in The gauning area
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!Preparations
!Preparations
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'''Before the "questions and exercises" session'''
'''Before the lecture'''
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture video]
* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
'''Before training session'''
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Courses"