LabAdviser/Courses: Difference between revisions

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 ==The Dry Etch TPT [[image:Under_construction.png|70px]] ==
+DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
+The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
+{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
+|-
+|-
+|-style="background:White; color:black; text-align:center"
+!colspan="2"|Lithography Tool Package Training
+|-
+|-
+!Schedule
+|
+<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
+'''Theoretical part'''
+* The lecture has been replaced by videos that can be viewed at one's leisure.
+* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
+* NEXT "questions and exercises" sessions: '''31st of March, 21st of April, 28th of April, 19th of May'''
+'''Practical part'''
+* A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
+* NEXT training sessions: '''5th of April, 26th of April, 3rd of May, 24th of May'''
+|-
+|-
+!Location
+|
+'''Theoretical part'''
+* The location of the "questions and exercises" session will be specified after signing up for the course.
+'''Practical part'''
+* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
+|-
+|-
+!Qualified Prerequisites
+|
+* Cleanroom safety course at DTU Danchip
+* Admission to the cleanroom must be obtained before the training session
+|-
+|-
+!Preparations
+|
+'''Before the "questions and exercises" session'''
+* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
+* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
+'''Before training session'''
+* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
+* Study the equipment manuals. The manuals are available in LabManager.
+* Study the TPT process flows (first print, and alignment).
+'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
+|-
+|-
+!Course Responsible
+|
+The Lithography Group at DTU Danchip.
+Sign up for the course by e-mailing to [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk].
+|-
+|-
+!Learning Objectives
+|
+* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
+* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
+* Calculate relevant process parameters
+* Analyze and apply your results of lithographic processing
+|-
+|}
+<br clear="all" />
+===Material for preparations and further information===
+{| style="color: black;" width="90%"
+| colspan="3" |
+|-
+| style="width: 20%"|
+'''<big>Literature</big>'''
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
+*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
+*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
+'''<big>Lecture videos</big>'''
+*[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos] (7 videos, 2:41 hours in total)
+'''<big>Slides from Lecture</big>'''
+*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
+*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
+*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
+*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
+*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
+*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
+| style="width: 20%"|
+'''<big>Training videos</big>'''
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater_V2-720p.mp4 Training Video: Manual Spin Coater]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
+*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
+'''<big>Manuals</big>'''
+*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
+*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists]
+*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
+*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
+*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual]
+'''<big>Process Flows</big>'''
+*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
+*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]]
+| style="width: 20%"|
+|}
+<br clear="all" />
 ==The SEM TPT [[image:Under_construction.png|70px]] ==