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==The Lithography TPT== | ==The Lithography TPT== | ||
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. | |||
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment. | |||
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!colspan="2"|Lithography Tool Package Training | |||
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!Schedule | |||
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<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>--> | |||
'''Theoretical part''' | |||
* The lecture has been replaced by videos that can be viewed at one's leisure. | |||
* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30). | |||
* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May''' | |||
'''Practical part''' | |||
* A 4-5 hour training session once a week, max. 4 persons per session (typically Wednesdays 09:00 - 14:00). | |||
* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May''' | |||
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!Location | |||
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'''Theoretical part''' | |||
* The location of the "questions and exercises" session will be specified after signing up for the course. | |||
'''Practical part''' | |||
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment. | |||
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!Qualified Prerequisites | |||
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* Cleanroom safety course at DTU Danchip | |||
* Admission to the cleanroom must be obtained before the training session | |||
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!Preparations | |||
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'''Before the "questions and exercises" session''' | |||
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | |||
* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | |||
'''Before training session''' | |||
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | |||
* Study the equipment manuals. The manuals are available in LabManager. | |||
* Study the TPT process flows (first print, and alignment). | |||
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below. | |||
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!Course Responsible | |||
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The Lithography Group at DTU Danchip. | |||
Sign up for the course by e-mailing to [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk]. | |||
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!Learning Objectives | |||
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* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows | |||
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip | |||
* Calculate relevant process parameters | |||
* Analyze and apply your results of lithographic processing | |||
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===Material for preparations=== | |||
==The Dry Etch TPT== | ==The Dry Etch TPT== | ||
==The SEM TPT== | ==The SEM TPT== | ||