LabAdviser/Technology Research

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The aim of this page is to give an overview of the technology research going on in the cleanroom and the other laboratories facilitated by DTU Danchip. Here technology research projects will be presented. This includes a project description and links to other pages in LabAdviser where the process development outcome from these projects can be found. We urge all our users that do technology research at these facilities to present their activities here. At DTU Danchip we commit our selves to present the technology research that we initiate to share the outcome with our users, as this is the main purpose for this research.

If you perform technology research in the DTU Danchip facilities, please contribute to this overview page. Start by contacting Berit Herstrøm.

Current Projects

• Nanoscale Dry Etching - Technology Development and Applications - initiated November 2015
• Frontier Studies of Metal Thin Films - Deposition and Characterization - initiated November 2014
• Ice Lithography for Advanced Nanofabrication - initiated November 2014
• Nanofabrication of Inductive Components for Integrated Power Supply On Chip - initiated November 2014

Completed Projects

• Microfabrication of Hard x-ray Lenses - initiated December 2012
• Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition - initiated November 2013

Presentation Form for Presenting Technology Research here

• Presentation Form