Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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*The next course is the 21rd of March from 9:00 - please sign up now by writing to [mailto:sem@danchip.dtu.dk SEM@danchip.dtu.dk] | *The next course is the 21rd of March from 9:00 - please sign up now by writing to [mailto:sem@danchip.dtu.dk SEM@danchip.dtu.dk] | ||
*Here you will find links to tool packages learning material, training videos and the lecture slides. | *Here you will find links to tool packages learning material, training videos and the lecture slides. | ||
**Before the lecture please read “Scanning Electron Microscopy Primer” by Bob Hafner. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material or [http://www.charfac.umn.edu/sem_primer.pdf | **Before the lecture please read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here] | ||
**Training videos can be found on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos | **Training videos can be found on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Training videos | ||
**Lecture | **Lecture slides will be uploaded here after the lecture | ||
* For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-SEM-tool-package-training-TPT- SEM TPT] | * For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-SEM-tool-package-training-TPT- SEM TPT] | ||
== Common challenges in scanning electron microscopy == | == Common challenges in scanning electron microscopy == | ||