Jump to content

Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

Choi (talk | contribs)
Choi (talk | contribs)
Line 90: Line 90:
!Allowed materials
!Allowed materials
|
|
No restrictions when used in beaker or PP-etch bath in the fume hood in cleanroom 2.  
Practically no restrictions when used in beaker or 'HF5%/BHF-dirty' bath in Fumehood(RCA) in cleanroom B-1.  
Make a note on the beaker of which materials have been processed.  
Make a note on the beaker of which materials have been processed.  
|
|
No restrictions when used in beaker.
Practically no restrictions when used in beaker.
Make a note on the beaker of which materials have been processed.  
Make a note on the beaker of which materials have been processed.  
|-
|-
|}
|}