Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
Appearance
| Line 90: | Line 90: | ||
!Allowed materials | !Allowed materials | ||
| | | | ||
Practically no restrictions when used in beaker or 'HF5%/BHF-dirty' bath in Fumehood(RCA) in cleanroom B-1. | |||
Make a note on the beaker of which materials have been processed. | Make a note on the beaker of which materials have been processed. | ||
| | | | ||
Practically no restrictions when used in beaker. | |||
Make a note on the beaker of which materials have been processed. | Make a note on the beaker of which materials have been processed. | ||
|- | |- | ||
|} | |} | ||