Specific Process Knowledge/Thermal Process: Difference between revisions
New page: == Choose a process type == *Oxidation - grow an oxide *Annealing *Dope with Phosphorus *Dope with Boron == Choose an equipment to use == *A1 Furnace Boron drive-in - ''For oxidation of... |
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*Furnace Noble - ''For non-clean annealing'' | *Furnace Noble - ''For non-clean annealing'' | ||
*Furnace Dry oxide - ''For oxidation of 2" wafers'' | *Furnace Dry oxide - ''For oxidation of 2" wafers'' | ||
*Furnace APOX - ''Furnace for growing very thick oxide'' | |||
*Jipelec RTP - ''For Rapid Thermal Anneal of III-V materials and Silicon based material'' | *Jipelec RTP - ''For Rapid Thermal Anneal of III-V materials and Silicon based material'' | ||