Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
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# BHF (wetbench or fumehood) | # BHF (wetbench or fumehood) | ||
# Cold RCA1 (fumehood) | # Cold RCA1 (fumehood) | ||
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BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. | BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. | ||