Specific Process Knowledge/Etch/Wet Platinum Etch: Difference between revisions
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Etch rate | !Etch rate | ||
| Mainly used as stripper | | 1-10 nm/min (Not tested. Mainly used as stripper) | ||
|- | |- | ||