Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b> | |style="background:WhiteSmoke; color:black"|<b>Si Etch 01</b> | ||
|style="background:WhiteSmoke; color:black"|<b> | |style="background:WhiteSmoke; color:black"|<b>Si Etch 02</b> | ||
|style="background:WhiteSmoke; color:black"|<b> | |style="background:WhiteSmoke; color:black"|<b>Si Etch 3 Fumehood</b> | ||
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!style="background:silver; color:black;" align="center" width="60" rowspan="2"|Purpose | !style="background:silver; color:black;" align="center" width="60" rowspan="2"|Purpose | ||
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|style="background:LightGrey; color:black"|Link to safety APV and KBA | |style="background:LightGrey; color:black"|Link to safety APV and KBA | ||
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*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach= | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=407 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | *:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||