Specific Process Knowledge/Etch: Difference between revisions
| Line 87: | Line 87: | ||
**Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] | **Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] | ||
**Lecture slides with explanatory text included [[Media:TPT Dry etching slides with notes ver1.pdf]] | **Lecture slides with explanatory text included [[Media:TPT Dry etching slides with notes ver1.pdf]] | ||
* For more | * For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-dry-etch-tool-package-training-TPT- Dry Etch TPT] | ||