Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
| Line 155: | Line 155: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
! | ! | ||
! BHF clean in D-3 | ! BHF clean in D-3 (Oxide etch 1: BHF) | ||
! BHF in D-3 (Oxide etch | ! BHF in D-3 (Oxide etch 2: BHF) | ||
! BHF in RCA Bench | ! BHF in RCA Bench | ||
! BHF in PP-bath | ! BHF in PP-bath | ||