Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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=ALD 2 (PEALD)= | =ALD 2 (PEALD)= | ||
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/ | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD2_(PEALD) click here]''' | ||
[[Category: Equipment|Thin film]] | [[Category: Equipment|Thin film]] | ||
[[Category: Thin Film Deposition|ALD]] | [[Category: Thin Film Deposition|ALD]] | ||
== Thermal ALD and PEALD == | == Thermal ALD and PEALD == | ||