Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions

Revision as of 20:36, 3 April 2008 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →The FLAT recipe ← Older edit		Revision as of 20:40, 3 April 2008 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits →The FLAT recipe Newer edit →
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	== The FLAT recipe ==		== The FLAT recipe ==

	The FLAT recipe is designed for coating of non-structured wafers.		The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections pf FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes.