Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[/Physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | *[[/Physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | ||
*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] - ''Sputter deposition of high quality optical layers and milling/etching'' | *[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] - ''Sputter deposition of high quality optical layers and milling/etching'' | ||
*[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] -<span style="color:Red"> (Decommissioned</span>) ''Gold sputtering system'' | <!--*[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] -<span style="color:Red"> (Decommissioned</span>) ''Gold sputtering system'' | ||
*[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] -<span style="color:Red"> (Decommissioned</span>) ''Gold sputtering system'' | *[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] -<span style="color:Red"> (Decommissioned</span>) ''Gold sputtering system'' --> | ||
*[[/Sputter coater# | *[[/Sputter coater#Sputter_coater_03_(Cressington)|Sputter coater 03]] - ''Gold sputtering system'' | ||
*[[/Sputter coater# | *[[/Sputter coater#Sputter_coater_04_(Agar Scientific)|Sputter coater 04]] - ''Gold sputtering system'' | ||
*[[/III-V Dielectric evaporator|III-V Dielectric evaporator]] - ''E-beam evaporation tool'' | *[[/III-V Dielectric evaporator|III-V Dielectric evaporator]] - ''E-beam evaporation tool'' | ||
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