Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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# '''A pressure gradient''' The vapor pressure of the chemical (when stored at some temperature in the cylinder) compared to the pressure in the chamber. | # '''A pressure gradient''' The vapor pressure of the chemical (when stored at some temperature in the cylinder) compared to the pressure in the chamber. | ||
#'''A temperature gradient''' The chemical and the line that feeds the process chamber are kept at a higher temperature. | #'''A temperature gradient''' The chemical and the line that feeds the process chamber are kept at a higher temperature. | ||
It is critical that the chemicals with the lowest vapor pressure are injected first into the process chamber. | It is critical that the chemicals with the lowest vapor pressure are injected first into the process chamber. If, for instance, water is injected before FDTS, the water will flow into the FTDS expansion volume and cause polymerization, thus forcing a mechanical clean. NOT GOOD!. | ||
== The FLAT recipe == | == The FLAT recipe == | ||