Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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*0.5µm -> 5µm | *0.5µm -> 5µm | ||
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | |Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | ||
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*Confocal (depending on objective): 1nm -> 50nm | *Confocal (depending on objective): 1nm -> 50nm | ||
|<1Å - accuracy better than 2% | |<1Å - accuracy better than 2% | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
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*Somewhere between 1:1 and 1:12 | *Somewhere between 1:1 and 1:12 | ||
|~1:1 with standard cantilever. | |~1:1 with standard cantilever. | ||
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*White broadband LED: 550nm | *White broadband LED: 550nm | ||
|<12 nm on standard cantilever | |<12 nm on standard cantilever | ||
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