Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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; Vapor order | ; Vapor order | ||
: There is no active force that injects the chemicals into the process chamber. The driving force is a combination of two factors: | : There is no active force that injects the chemicals into the process chamber. The driving force is a combination of two factors: | ||
## '''A pressure gradient''' The vapor pressure of the chemical (when stored at some temperature in the cylinder) compared to the pressure in the chamber. | |||
##'''A temperature gradient''' The chemical and the line that feeds the process chamber are kept at a higher temperature. | |||
== The FLAT recipe == | == The FLAT recipe == | ||