Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions
| Line 73: | Line 73: | ||
* Metals | * Metals | ||
* Carbon | * Carbon | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! Comment | ! Comment | ||
| | | | ||
*Use 2 inch target | |||
*Substrate rotation | |||
*Substrate RF Bias (optional) | |||
| | | | ||
|} | |} | ||
'''*''' ''For thicknesses above 200 nm permission is required.'' | '''*''' ''For thicknesses above 200 nm permission is required.'' | ||