Jump to content

Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
Line 74: Line 74:
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* E-beam lithography using Raith Elphy Quantum system
* E-beam lithography using Raith Elphy Quantum system
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|  
|style="background:WhiteSmoke; color:black"|&nbsp
|style="background:WhiteSmoke; color:black"|  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|  
* Surface material analysis using EDX
* Surface material analysis using EDX
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|