Specific Process Knowledge/Characterization/SEM Tabletop 1: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||
!colspan="2" border="none" style="background:silver; color:black; | !colspan="2" border="none" style="background:silver; color:black;"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>SEM Tabletop 1 (Hitachi TM3030 Plus )</b> | |style="background:WhiteSmoke; color:black"|<b>SEM Tabletop 1 (Hitachi TM3030 Plus )</b> | ||
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!style="background:silver; color:black" | !style="background:silver; color:black" rowspan="1"|Purpose | ||
|style="background:LightGrey; color:black"|Imaging and measurement of | |style="background:LightGrey; color:black"|Imaging and measurement of | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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* Thick polymers, glass or quartz samples | * Thick polymers, glass or quartz samples | ||
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!style="background:silver; color:black; | !style="background:silver; color:black;" width="60"|Location | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Basement of DTU Danchip | * Basement of DTU Danchip | ||
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!style="background:silver; color:black;" | !style="background:silver; color:black;" width="60"|Performance | ||
|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution | ||
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The resolution is strongly dependent on the type of sample and the skills of the operator. | The resolution is strongly dependent on the type of sample and the skills of the operator. | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Instrument specifics | ||
|style="background:LightGrey; color:black"|Detectors | |style="background:LightGrey; color:black"|Detectors | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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* Charge-up reduction vacuum mode: 50 Pa | * Charge-up reduction vacuum mode: 50 Pa | ||
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!style="background:silver; color:black" | !style="background:silver; color:black" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||