Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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|style="background:Whitesmoke; color:black" colspan="4" align="center"| FEG (Field Emission Gun) source | |style="background:Whitesmoke; color:black" colspan="4" align="center"| FEG (Field Emission Gun) source | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | * Thermionic tungsten filament | ||
<!--|style="background:WhiteSmoke; color:black"| | <!--|style="background:WhiteSmoke; color:black"| | ||
* Tungsten filament--> | * Tungsten filament--> | ||